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PEM
 
PEM
 
PEM(Photon Emission Microscopy)即发光显微镜,用来捕捉电子和空穴结合时产生的光子
它可以探测以下失效形式:
栅极氧化层被击穿
内部绝缘层短路
热电子损伤
闩锁效应
静电损伤
 
 
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